Exhibit 23.1

Deloitte Accountants B.V.

Flight Forum 1

5657 DA Eindhoven

P.O.Box 782

5600 AT Eindhoven

Netherlands

Tel: +31 (40) 2345000

Fax: +31 (40) 2345407

www.deloitte.nl

ASML Holding N.V.
De Run 6501
5504 DR VELDHOVEN

Date	From	Our reference
October 19, 2010	G.M. Dekker	le9958
Subject

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the incorporation by reference in this Registration Statement on Form S-8 of our reports relating to the financial statements of ASML Holding N.V. and the effectiveness of ASML Holding N.V.’s internal control over financial reporting dated January 29, 2010, appearing in the Annual Report on Form 20-F of ASML Holding N.V. for the year ended December 31, 2009.

Deloitte Accountants B.V.
 

/s/ G.M. Dekker  

The General Terms and Conditions for Services Deloitte Netherlands, June 2009’ registered at the Chamber of Commerce under number 24362837 apply to all agreements under which Deloitte performs services.	Member of Deloitte Touche Tohmatsu
Deloitte Accountants B.V. is registered with the Trade Register of the Chamber of Commerce and Industry in Rotterdam number 24362853.