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Consolidated Statements of Cash Flows (Parenthetical) - EUR (€)
€ in Millions
12 Months Ended
Dec. 31, 2023
Dec. 31, 2022
Dec. 31, 2021
Cash received equity method investments € 218.0 € 178.7 [1] € 168.0
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG      
Ownership percentage (in percentage) 24.90%    
Funding provided for tooling equity method investment      
Additions related to non-cash transfers € 45.1 € 33.8 € 69.2
[1] Depreciation and amortization include depreciation of property, plant and equipment, amortization of intangible assets, amortization of
underwriting commissions and discount related to the bonds and credit facility.