Exhibit 15.1

Consent of Independent Registered Public Accounting Firm

To the Supervisory Board of ASML Holding N.V.

We consent to the incorporation by reference in the following Registration Statements on Form S-8 Nos. 333-116337, 333-126340, 333-136362. 333-141125,333-142254,333-144356, 333-147128, 333-153277, 333-162439, 333-170034, 333-188938, 333-190023, 333-192951, and 333-203390 of our report dated February 4, 2016, relating to the financial statements of ASML Holding N.V. and subsidiaries for the year ended December 31, 2015, appearing in the Annual Report on Form 20-F of ASML Holding N.V. for the year ended December 31, 2016.

/s/ Deloitte Accountants B.V.

Deloitte Accountants B.V.

Eindhoven, The Netherlands

February 7, 2017