Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands	3 Months Ended	6 Months Ended
Mar. 31, 2022	Mar. 31, 2022
Discontinued Operation, Alternative Cash Flow Information [Abstract]
Capital expenditures	$ 579	$ 2,862
Stock-based compensation	$ 3,109	$ 8,032

Amount of capital expenditure attributable to discontinued operations.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 205
-SubTopic 20
-Section 50
-Paragraph 5B
-Subparagraph (c)(2)
-URI https://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760

Name:	us-gaap_CapitalExpenditureDiscontinuedOperations
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration