Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Mar. 31, 2023	Mar. 31, 2022	Mar. 31, 2023	Mar. 31, 2022
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ (2,936)	$ 2,121,690	$ (2,936)	$ 2,162,152
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		60,760		264,430
Total cost of revenue		36,418		152,324
Gross profit		24,342		112,106
Research and development		4,746		18,486
Selling, general and administrative		7,466		30,142
Total operating expenses		12,212		48,628
Operating income		12,130		63,478
Gain on divestiture		2,561,420		2,561,374
Income before income taxes		2,573,550		2,624,852
Income tax provision		451,860		462,700
Net income from discontinued operations	(400)	2,121,690		2,162,152
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		56,722		244,962
Total cost of revenue		33,568		141,165
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		4,038		19,468
Total cost of revenue		$ 2,850		$ 11,159
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ (2,500)