CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2020
Cash flows from operating activities
Net income	$ 2,132,859	$ 110,747	$ 64,853
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation and amortization	53,702	65,333	65,496
Impairment of intangible assets		13,364
Stock-based compensation	10,666	27,456	16,317
Amortization of premium on marketable securities and deferred financing costs	(1,894)	225	233
Deferred income taxes	24,469	(17,265)	(5,407)
Loss on extinguishment of debt	632
(Gain) loss on disposals of property, plant and equipment	(21)	260	226
(Gain) loss on divestiture, net of tax	(2,130,265)	948	319
Fees paid stemming from divestiture	(52,461)
Taxes paid stemming from divestiture	(431,600)		(91,500)
Changes in operating assets and liabilities, net of acquisitions and divestiture:
Accounts receivable	(31,397)	(69,643)	(18,755)
Inventories	(66,629)	(50,443)	(13,144)
Accounts payable	(3,926)	30,967	792
Deferred revenue	16,599	(3,939)	(139)
Accrued warranty and retrofit costs	303	54	760
Accrued compensation and tax withholdings	11,404	7,298	11,097
Other current assets and liabilities	1,513	34,495	6,718
Net cash (used in) provided by operating activities	(466,046)	149,857	37,866
Cash flows from investing activities
Purchases of property, plant and equipment	(73,435)	(52,805)	(39,924)
Purchases of technology intangibles	(4,000)
Purchases of marketable securities	(1,975,599)	(151)	(10,894)
Sales and maturities of marketable securities	705,384	121	44,820
Proceeds from divestiture, net of cash transferred	2,939,116
Adjustment to proceeds from divestiture		(1,802)
Acquisitions, net of cash acquired	(125,876)	(93,712)	(15,744)
Settlement (issuance) of note receivables		2,000	(1,000)
Net cash provided by (used in) investing activities	1,465,590	(146,349)	(22,742)
Cash flows from financing activities
Proceeds from issuance of common stock	5,245	5,812	4,595
Principal payments on debt	(49,725)	(828)	(828)
Payments of finance leases	(388)	(1,164)	(1,277)
Payment for contingent consideration related to acquisition	(10,400)
Common stock dividends paid	(7,494)	(29,726)	(29,513)
Net cash used in financing activities	(62,762)	(25,906)	(27,023)
Effects of exchange rate changes on cash and cash equivalents	(180,819)	5,205	9,254
Net increase (decrease) in cash, cash equivalents and restricted cash	755,963	(17,193)	(2,645)
Cash, cash equivalents and restricted cash, beginning of period	285,333	302,526	305,171
Cash, cash equivalents and restricted cash, end of period	1,041,296	285,333	302,526
Supplemental disclosures:
Cash paid for interest	469	1,435	2,159
Cash paid for income taxes, net	$ 452,461	$ 38,020	$ 102,010