Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2020
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ 2,144,145	$ 139,616	$ 91,215
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	264,430	680,056	508,736
Total cost of revenue	152,324	384,536	300,861
Gross profit	112,106	295,520	207,875
Research and development	18,486	48,647	41,245
Selling, general and administrative	30,622	70,634	50,881
Restructuring charges		230	692
Total operating expenses	49,108	119,511	92,818
Operating income	62,998	176,009	115,057
Gain on divestiture	2,561,820	133	207
Income before income taxes	2,624,818	176,142	115,264
Income tax provision	480,673	35,357	23,867
Net income from discontinued operations	2,144,145	140,785	91,397
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	244,962	624,358	463,309
Total cost of revenue	141,165	354,786	274,727
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	19,468	55,698	45,427
Total cost of revenue	$ 11,159	$ 29,750	$ 26,134