CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	9 Months Ended
	Jun. 30, 2022	Jun. 30, 2021
Cash flows from operating activities
Net income	$ 2,153,624	$ 88,942
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation and amortization	38,813	48,684
Stock-based compensation	10,715	20,277
Amortization of deferred financing costs and unrealized gains/losses on investments	(7,048)	169
Deferred income taxes	24,207	(10,293)
Loss on extinguishment of debt	632
(Gain) loss on disposals of property, plant and equipment	(100)
Gain on divestiture, net of tax	(2,128,761)	225
Adjustment to the gain on divestiture of semiconductor cryogenics business, net of tax		948
Fees paid stemming from divestiture	(52,461)
Taxes paid stemming from divestiture	(431,600)
Changes in operating assets and liabilities, net of acquisitions and divestiture:
Accounts receivable	(16,298)	(40,286)
Inventories	(61,345)	(32,532)
Prepaid expenses and other assets	(61,692)	4,000
Accounts payable	(8,320)	23,327
Deferred revenue	8,580	(1,564)
Accrued warranty and retrofit costs	(28)	(286)
Accrued compensation and tax withholdings	13,835	(338)
Accrued restructuring costs	(126)	(153)
Accrued expenses and other liabilities	41,693	21,626
Net cash (used in) provided by operating activities	(475,680)	122,745
Cash flows from investing activities
Purchases of property, plant and equipment	(59,730)	(34,606)
Purchases of technology intangibles	(4,000)
Purchases of marketable securities	(1,525,993)	(100)
Sales and maturities of marketable securities	503,505	50
Proceeds from divestiture, net of cash transferred	2,926,286
Acquisitions, net of cash acquired		(94,178)
Net cash provided by (used in) investing activities	1,840,068	(128,834)
Cash flows from financing activities
Proceeds from issuance of common stock	3,461	2,583
Principal payments on debt	(49,725)	(828)
Payments of finance leases	(355)	(915)
Payment for contingent consideration related to acquisition	(10,400)
Common stock dividends paid	(7,494)	(22,288)
Net cash used in financing activities	(64,513)	(21,448)
Effects of exchange rate changes on cash and cash equivalents	(98,972)	7,582
Net increase (decrease) in cash, cash equivalents and restricted cash	1,200,903	(19,955)
Cash, cash equivalents and restricted cash, beginning of period	285,333	257,526
Cash, cash equivalents and restricted cash, end of period	$ 1,486,236	$ 237,571