Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands	3 Months Ended	6 Months Ended
Mar. 31, 2021	Mar. 31, 2020	Mar. 31, 2022	Mar. 31, 2021
Discontinued Operation, Alternative Cash Flow Information [Abstract]
Depreciation and amortization		$ 1,677		$ 3,696
Capital expenditures	$ 579	904	$ 2,862	2,731
Stock-based compensation	$ 3,109	$ 4,088	$ 8,032	$ 5,963

Amount of deprecation and amortization expense attributable to property, plant and equipment and intangible assets of discontinued operations.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3602-108585

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 205
-SubTopic 20
-Section 50
-Paragraph 5B
-Subparagraph (c)(2)
-URI http://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration