Discontinued Operations - General Information (Details) $ in Thousands		3 Months Ended	6 Months Ended
	Feb. 01, 2022 USD ($) lease	Mar. 31, 2022 USD ($)	Mar. 31, 2022 USD ($)	Mar. 31, 2021 USD ($)
Thomas H. Lee Partners, L.P.
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Transition service agreement, term, low end of range	3 months
Transition service agreement, term, high end of range	24 months
Sale leaseback transaction, lease agreements, number | lease	2
Sale leaseback transaction, lease term	24 months
Sale leaseback transaction, termination notice period	90 days
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Proceeds from divestiture	$ 2,900,000
Cash proceeds after adjustments and deducting taxes and other items	2,500,000
Gain on divestiture		$ 2,561,420	$ 2,561,374
Liability related to retention and stock compensation for former employees of the Company that were conveyed with the transaction	$ 18,100
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Net gain (loss) on sale				$ (1,300)