Discontinued Operations - Assets and Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2021	Sep. 30, 2021	Dec. 31, 2020
Disposal Group, Including Discontinued Operation, Assets, Current [Abstract]
Cash and cash equivalents	$ 45,000		$ 45,000
Total current assets of discontinued operation	324,533	$ 311,385
Disposal Group, Including Discontinued Operation, Assets, Noncurrent [Abstract]
Total long-term assets of discontinued operation	186,162	183,828
Disposal Group, Including Discontinued Operation, Liabilities, Current [Abstract]
Total current liabilities of discontinued operation	120,749	128,939
Disposal Group, Including Discontinued Operation, Liabilities, Noncurrent [Abstract]
Total long-term liabilities of discontinued operation	31,976	32,444
Discontinued Operations, Held-for-sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Assets, Current [Abstract]
Cash and cash equivalents	45,000	45,000
Accounts receivable, net	133,578	142,256
Inventories	132,010	110,735
Other current assets	13,945	13,394
Total current assets of discontinued operation	324,533	311,385
Disposal Group, Including Discontinued Operation, Assets, Noncurrent [Abstract]
Property, plant and equipment, net	34,457	32,058
Long-term deferred tax assets	2,518	3,167
Goodwill	81,514	81,477
Intangibles, net	44,576	44,468
Other assets	23,097	22,658
Total long-term assets of discontinued operation	186,162	183,828
Disposal Group, Including Discontinued Operation, Liabilities, Current [Abstract]
Accounts payable	65,285	68,074
Deferred revenue	8,160	7,141
Accrued warranty and retrofit costs	5,912	6,081
Accrued compensation and benefits	20,963	18,144
Accrued Income Taxes	6,184	11,702
Accrued expenses and other current liabilities	14,454	18,014
Total current liabilities of discontinued operation	120,958	129,156
Disposal Group, Including Discontinued Operation, Liabilities, Noncurrent [Abstract]
Long-term tax reserves	2,373	2,356
Long-term deferred tax liabilities	6,716	6,548
Long-term pension liabilities	5,547	5,490
Long-term operating lease liabilities	15,837	15,425
Other long-term liabilities	1,503	2,625
Total long-term liabilities of discontinued operation	$ 31,976	$ 32,444