Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Held-for-sale - Semiconductor Automation Business - USD ($) $ in Thousands	3 Months Ended
Dec. 31, 2021	Dec. 31, 2020
Discontinued Operation, Alternative Cash Flow Information [Abstract]
Depreciation and amortization		$ 2,019
Capital expenditures	$ 2,283	1,827
Stock-based compensation	$ 4,923	$ 1,875

Amount of deprecation and amortization expense attributable to property, plant and equipment and intangible assets of discontinued operations.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3602-108585

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 205
-SubTopic 20
-Section 50
-Paragraph 5B
-Subparagraph (c)(2)
-URI http://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760

Name:	us-gaap_DepreciationAndAmortizationDiscontinuedOperations
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration