Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	3 Months Ended
Dec. 31, 2021	Dec. 31, 2020
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ 40,462	$ 23,322
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	203,670	131,361
Total cost of revenue	115,906	75,568
Gross profit	87,764	55,793
Research and development	13,740	10,994
Selling, general and administrative	22,676	14,099
Restructuring charges		127
Total operating expenses	36,416	25,220
Operating income	51,348	30,573
Other income (loss), net	(46)	(1,239)
Income before income taxes	51,302	29,334
Income tax provision	10,840	6,012
Net income from discontinued operations	40,462	23,322
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business \| Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	188,240	118,154
Total cost of revenue	107,597	68,777
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business \| Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	15,430	13,207
Total cost of revenue	$ 8,309	$ 6,791

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