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Discontinued Operations - General Information (Details) - USD ($)
$ in Millions
12 Months Ended
Sep. 20, 2021
Jul. 01, 2019
Aug. 27, 2018
Sep. 30, 2019
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]        
Net gain (loss) on sale       $ 408.6
Edwards Vacuum LLC        
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]        
Transition service agreement, term, high end of range     9 months  
Aggregate amount to purchase goods     $ 1.0  
Supply agreement term     1 year  
Lease term     3 years  
Option to renew     true  
Ulvac Cryogenics Incorporated        
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]        
Ownership interest (as a percent)     50.00%  
Discontinued Operations, Held-for-sale | Semiconductor Automation Business        
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]        
Consideration $ 3,000.0      
Discontinued operation, name of segment brks:BrooksSemiconductorSolutionsGroupMember      
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business        
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]        
Consideration   $ 661.5 $ 675.0  
Net working capital adjustments   6.3    
Net cash proceeds from the sale   $ 553.1    
Discontinued operation, name of segment     brks:BrooksSemiconductorSolutionsGroupMember