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Discontinued Operations - General Information (Details) - USD ($)
$ in Millions
3 Months Ended
Jul. 01, 2019
Aug. 27, 2018
Dec. 31, 2020
Edwards Vacuum LLC      
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]      
Transition service agreement, term, high end of range   9 months  
Aggregate amount to purchase goods   $ 1.0  
Supply agreement term   1 year  
Lease term   3 years  
Option to renew   true  
ULVAC Cryogenics, Inc.      
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]      
Ownership interest (as a percent)   50.00%  
Discontinued Operations, Held-for-sale | Semiconductor Cryogenics Business      
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]      
Consideration   $ 675.0  
Discontinued operation, name of segment   brks:BrooksSemiconductorSolutionsGroupMember  
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business      
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]      
Consideration $ 659.8    
Net working capital adjustments (1.8)    
Net cash proceeds from the sale $ 551.7    
Net gain (loss) on sale     $ 1.3