Amount classified as accounts payable attributable to disposal group held for sale or disposed of, expected to be disposed of within one year or the normal operating cycle, if longer.

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Name:	us-gaap_DisposalGroupIncludingDiscontinuedOperationAccountsPayableCurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

Basis of Presentation (Details) - Semiconductor Cryogenics Business - USD ($) $ in Millions	Jul. 01, 2019	Sep. 30, 2018	Aug. 27, 2018	Sep. 30, 2017
Discontinued Operations, Disposed of by Sale
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Consideration	$ 661.5
Net working capital adjustments	$ 6.3
Discontinued Operations, Held-for-sale
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Consideration			$ 675.0
Disposal Group, Including Discontinued Operation, Accounts Payable and Accrued Liabilities, Current [Abstract]
Accounts payable		$ 11.1		$ 10.6