Discontinued Operations - Unconsolidated Subsidiaries - Statements of Operations (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2020	Jun. 30, 2019	Jun. 30, 2020	Jun. 30, 2019
Equity Method Investment, Summarized Financial Information [Abstract]
Gross profit	$ 92,788	$ 83,510	$ 268,055	$ 236,106
Operating income	$ 19,099	16,423	44,337	35,427
Net income			$ 35,880	25,090
ULVAC Cryogenics, Inc.
Equity Method Investment, Summarized Financial Information [Abstract]
Total revenue		23,209		68,252
Gross profit		9,905		27,134
Operating income		5,267		14,476
Net income		$ 3,674		$ 9,777