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Revenue from Contracts with Customers - Segment Information (Details) - segment
3 Months Ended 9 Months Ended
Jun. 30, 2020
Jun. 30, 2019
Jun. 30, 2020
Jun. 30, 2019
Segment Reporting Information [Line Items]        
Number of reportable segments 2 2 2 2
Number of reporting units 6 6 6 6
Brooks Semiconductor Solutions Group        
Segment Reporting Information [Line Items]        
Number of reporting units 3 3 3 3
Brooks Life Sciences        
Segment Reporting Information [Line Items]        
Number of reporting units 3 3 3 3