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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Mar. 31, 2020
Sep. 30, 2019
Goodwill [Line Items]    
Gross goodwill $ 1,113,460 $ 1,103,560
Accumulated goodwill impairments (614,958) (614,958)
Goodwill 498,502 488,602
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 636,910 636,791
Accumulated goodwill impairments (588,944) (588,944)
Goodwill 47,966 47,847
Brooks Life Sciences    
Goodwill [Line Items]    
Gross goodwill 450,536 440,755
Goodwill 450,536 440,755
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)