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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Sep. 30, 2019
Sep. 30, 2018
Sep. 30, 2017
Goodwill [Line Items]      
Gross goodwill $ 1,103,560 $ 870,834 $ 822,112
Accumulated goodwill impairments (614,958) (614,958) (614,958)
Goodwill 488,602 255,876 207,154
Brooks Semiconductor Solutions Group      
Goodwill [Line Items]      
Gross goodwill 636,791 636,907 629,278
Accumulated goodwill impairments (588,944) (588,944) (588,944)
Goodwill 47,847 47,963 40,334
Brooks Life Sciences      
Goodwill [Line Items]      
Gross goodwill 440,755 207,913 166,820
Goodwill 440,755 207,913 166,820
Other      
Goodwill [Line Items]      
Gross goodwill 26,014 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014) $ (26,014)