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Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Held-for-sale - Semiconductor Cryogenics Business - USD ($)
$ in Thousands
3 Months Ended 9 Months Ended
Jun. 30, 2019
Jun. 30, 2018
Jun. 30, 2019
Jun. 30, 2018
Discontinued Operation, Alternative Cash Flow Information [Abstract]        
Depreciation and amortization $ 4 $ 196 $ 4 $ 588
Capital expenditures 87 55 494 127
Stock-based compensation 215 238 635 730
Earnings of equity method investment $ (1,835) $ (1,329) $ (4,876) $ (4,931)