Discontinued Operations - Unconsolidated Subsidiaries - Balance Sheets (Details) - ULVAC Cryogenics, Inc. - USD ($) $ in Thousands	Jun. 30, 2019	Sep. 30, 2018
Equity Method Investment, Summarized Financial Information [Abstract]
Current assets	$ 76,534	$ 69,302
Non-current assets	22,175	21,338
Current liabilities	27,928	26,006
Non-current liabilities	$ 9,338	$ 8,397

The amount of noncurrent liabilities reported by an equity method investment of the entity.

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