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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Sep. 30, 2018
Sep. 30, 2017
Sep. 30, 2016
Goodwill [Line Items]      
Gross goodwill $ 870,834 $ 822,112 $ 790,612
Accumulated goodwill impairments (614,958) (614,958) (614,958)
Goodwill 255,876 207,154 175,654
Brooks Semiconductor Solutions Group      
Goodwill [Line Items]      
Gross goodwill 636,907 629,278 629,297
Accumulated goodwill impairments (588,944) (588,944) (588,944)
Goodwill 47,963 40,334 40,353
Brooks Life Sciences      
Goodwill [Line Items]      
Gross goodwill 207,913 166,820 135,301
Goodwill 207,913 166,820 135,301
Other      
Goodwill [Line Items]      
Gross goodwill 26,014 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014) $ (26,014)