Acquisitions - Results of Operations (Details) - USD ($) $ in Thousands	3 Months Ended	9 Months Ended
	Jun. 30, 2018	Jun. 30, 2018	Jun. 30, 2017
Business Acquisition, Pro Forma Information [Abstract]
Amortization of acquired intangible assets		$ 17,700	$ 12,700
Net loss attributable to noncontrolling interest	$ (111)	(111)
Tec-Sem Group AG
Business Acquisition, Pro Forma Information [Abstract]
Actual revenues	4,300
Actual net income (loss)	(1,600)
Inventory step up	700
Amortization of acquired intangible assets	1,000
Net loss attributable to noncontrolling interest	100	100
4titude Limited
Business Acquisition, Pro Forma Information [Abstract]
Actual revenues	3,900	11,600
Actual net income (loss)		(1,200)
Inventory step up	0	1,200
Amortization of acquired intangible assets	1,000	3,100
4titude Limited | Maximum
Business Acquisition, Pro Forma Information [Abstract]
Actual net income (loss)	100
PBMMI and Novare
Business Acquisition, Pro Forma Information [Abstract]
Actual revenues	3,200	8,000
Actual net income (loss)	400	300
Amortization of acquired intangible assets	400	1,200
Cool Lab, LLC
Business Acquisition, Pro Forma Information [Abstract]
Actual revenues	900	2,600
Actual net income (loss)	100	(100)
Amortization of acquired intangible assets	$ 300	$ 1,100