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Goodwill and Intangible Assets - Components of Goodwill by Operating Segment (Details) - USD ($)
$ in Thousands
Dec. 31, 2017
Sep. 30, 2017
Goodwill [Line Items]    
Gross goodwill $ 887,682 $ 848,596
Accumulated goodwill impairments (614,958) (614,958)
Goodwill 272,724 233,638
Brooks Semiconductor Solutions Group    
Goodwill [Line Items]    
Gross goodwill 655,747 655,762
Accumulated goodwill impairments (588,944) (588,944)
Goodwill 66,803 66,818
Brooks Life Science Systems    
Goodwill [Line Items]    
Gross goodwill 205,921 166,820
Goodwill 205,921 166,820
Other    
Goodwill [Line Items]    
Gross goodwill 26,014 26,014
Accumulated goodwill impairments $ (26,014) $ (26,014)