POWER OF ATTORNEY

Know all by these presents, that the undersigned

hereby constitutes and appoints each of Thomas S. Grilk  and Lynda M.

Avallone, signing singly, the undersigned's true and lawful

attorney-in-fact to:

(1) execute for and on behalf of the
undersigned,
in the undersigned's capacity as an officer and/or director
of Brooks
Automation, Inc. (the "Company"), Forms 3, 4, and 5 in
accordance with
Section 16(a) of the Securities Exchange Act of 1934 and
the rules
thereunder;

(2) do and perform any and all acts for and
on behalf of
the undersigned which may be necessary or desirable to
complete and execute
any such Form 3, 4, or 5, complete and execute any
amendment or amendments
thereto, and timely file such form with the
United States Securities and
Exchange Commission and any stock exchange
or similar authority; and


(3) take any other action of any type
whatsoever in connection with the
foregoing which, in the opinion of such
attorney-in-fact, may be of benefit
to, in the best interest of, or
legally required by, the undersigned, it
being understood that the
documents executed by such attorney-in-fact on
behalf of the undersigned
pursuant to this Power of Attorney shall be in
such form and shall
contain such terms and conditions as such
attorney-in-fact may approve in
such attorney-in-fact's discretion.


The undersigned hereby grants
to each such attorney-in-fact full power
and authority to do and perform
any and every act and thing whatsoever
requisite, necessary, or proper to
be done in the exercise of any of the
rights and powers herein granted,
as fully to all intents and purposes as
the undersigned might or could do
if personally present, with full power of
substitution or revocation,
hereby ratifying and confirming all that such
attorney-in-fact, or such
attorney-in-fact's substitute or substitutes,
shall lawfully do or cause
to be done by virtue of this power of attorney
and the rights and powers
herein granted.  The undersigned acknowledges
that the foregoing
attorneys-in-fact, in serving in such capacity at the
request of the
undersigned, are not assuming, nor is the Company assuming,
any of the
undersigned's responsibilities to comply with Section 16 of the

Securities Exchange Act of 1934.

This Power of Attorney shall
remain
in full force and effect until the undersigned is no longer
required to
file Forms 3, 4, and 5 with respect to the undersigned's
holdings of and
transactions in securities issued by the Company, unless
earlier revoked by
the undersigned in a signed writing delivered to the
foregoing
attorneys-in-fact.

IN WITNESS WHEREOF, the undersigned
has caused
this Power of Attorney to be executed as of this 26th day of
October,
2005.
/s/  Robert J. Lepofsky
Signature