Equity Method Investments Narrative (Detail) (USD $)	3 Months Ended		6 Months Ended		0 Months Ended
	Mar. 31, 2015	Mar. 31, 2014	Mar. 31, 2015	Mar. 31, 2014	Mar. 20, 2015	Dec. 22, 2014	Sep. 30, 2014
Schedule of Equity Method Investments [Line Items]
Equity in earnings (losses) of equity method investments	$ (73,000)	$ 510,000	$ (605,000)	$ 1,259,000
Goodwill	118,264,000		118,264,000				109,501,000
Equity method investments	27,027,000		27,027,000			2,500,000	28,944,000
Debt conversion, converted instrument, rate			9.00%
Equity method investment, additional financing						5,000,000
BioCision, LLC
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage		22.00%		22.00%
Equity in earnings (losses) of equity method investments	(300,000)		(500,000)
Investment cost		4,000,000		4,000,000
Equity method investments	3,200,000		3,200,000
Convertible debt securities	5,200,000		5,200,000
Warrants aggregate fair value	70,000		70,000
ULVAC Cryogenics, Inc.
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage	50.00%		50.00%
Equity in earnings (losses) of equity method investments	0	500,000	400,000	1,200,000
Equity method investments	21,900,000		21,900,000
Management fee payments received	200,000		300,000	300,000
Charges incurred from related parties	0	0	100,000
Accounts payable for unpaid products and services	46,000		46,000				79,000
Yaskawa Brooks Automation, Inc.
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage	50.00%		50.00%
Equity in earnings (losses) of equity method investments	200,000	35,000	(500,000)	0
Payments to acquire businesses					1,800,000
Goodwill					200,000
Equity method investments	1,900,000		1,900,000
Charges incurred from related parties	500,000	200,000	900,000	300,000
Accounts payable for unpaid products and services	0		0				100,000
Revenues earned from joint ventures	1,000,000	2,100,000	2,100,000	2,800,000
Due from joint venture	$ 0		$ 0				$ 2,100,000