Joint Ventures Narrative (Detail) (USD $)	3 Months Ended			3 Months Ended	9 Months Ended		3 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Sep. 30, 2013	Dec. 31, 2013 ULVAC Cryogenics, Inc.	Jun. 30, 2013 ULVAC Cryogenics, Inc.	Sep. 30, 2013 ULVAC Cryogenics, Inc.	Dec. 31, 2013 Yaskawa Brooks Automation, Inc.	Dec. 31, 2012 Yaskawa Brooks Automation, Inc.	Sep. 30, 2013 Yaskawa Brooks Automation, Inc.
Schedule of Equity Method Investments [Line Items]
Joint venture interest, percentage				50.00%			50.00%
Equity in earnings (losses) of joint ventures	$ 749,000	$ (6,000)		$ 767,000	$ 100,000		$ 0	$ (84,000)
Equity investment in joint ventures	25,336,000		25,687,000	22,500,000			2,800,000
Management fee payments received				200,000	100,000
Charges incurred from related parties				100,000	300,000		100,000	100,000
Accounts payable for unpaid products and services				11,000		0	47,000		47,000
Revenues earned from joint ventures							700,000	1,600,000
Due from joint venture							$ 1,000,000		$ 2,300,000