Joint Ventures Summarized Condensed Financial Information for Ulvac Cryogenics, Inc (Detail) (ULVAC Cryogenics, Inc., USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2013	Mar. 31, 2012	Mar. 31, 2013	Mar. 31, 2012
ULVAC Cryogenics, Inc.
Condensed Consolidating Financial Information [Line Items]
Revenue	$ 8,619	$ 18,196	$ 43,928	$ 18,879
Gross profit	2,409	5,135	12,807	5,660
Net income	$ (33)	$ 1,219	$ 2,951	$ 123