CONSOLIDATED STATEMENTS OF CASH FLOWS (USD $) In Thousands, unless otherwise specified	6 Months Ended
	Mar. 31, 2013	Mar. 31, 2012
Cash flows from operating activities
Net income (loss)	$ (9,730)	$ 12,557
Adjustments to reconcile net income (loss) to net cash provided by operating activities:
Depreciation and amortization	12,443	10,621
Stock-based compensation	5,010	4,924
Amortization of premium on marketable securities	661	1,244
Undistributed (earnings) losses of joint ventures	16	(1,480)
Deferred income tax benefit	(3,387)	0
Pension settlement	87	0
Loss on disposal of long-lived assets	(150)	(47)
Changes in operating assets and liabilities, net of acquisitions and disposals:
Accounts receivable	9,489	(2,951)
Inventories	13,734	3,540
Prepaid expenses and other current assets	(4,305)	(732)
Accounts payable	(3,260)	5,894
Deferred revenue	3,711	(3,949)
Accrued warranty and retrofit costs	(1,154)	(172)
Accrued compensation and benefits	(2,702)	(5,630)
Accrued restructuring costs	195	(168)
Accrued expenses and other current liabilities	(3,914)	(1,954)
Net cash provided by operating activities	16,744	21,697
Cash flows from investing activities
Purchases of property, plant and equipment	(1,578)	(4,384)
Purchases of marketable securities	(39,269)	(39,097)
Sale/maturity of marketable securities	98,178	61,970
Acquisition, net of cash acquired	(59,005)	(8,716)
Proceeds from the sale of property, plant and equipment	2,368	0
Payment of deferred leasing cost	(2,076)	0
Decrease in restricted cash	763	476
Net cash provided by (used in) investing activities	(619)	10,249
Cash flows from financing activities
Proceeds from issuance of common stock, net of issuance costs	969	842
Common stock dividend paid	(10,672)	(10,442)
Net cash used in financing activities	(9,703)	(9,600)
Effects of exchange rate changes on cash and cash equivalents	(940)	(24)
Net increase (decrease) in cash and cash equivalents	5,482	22,322
Cash and cash equivalents, beginning of period	54,639	58,833
Cash and cash equivalents, end of period	$ 60,121	$ 81,155