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Share-Based Compensation (Details) (USD $)
12 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Share-based compensation expense      
Share-based compensation $ 7,592,000 $ 5,854,000 $ 4,725,000
Less income tax effect (2,583,000) (2,104,000) (1,863,000)
Allocated Share-based Compensation Expense, Net of Tax 5,009,000 3,750,000 2,862,000
Capitalized share-based compensation included in inventory 139,000 174,000  
Compensation cost not yet recognized 14,700,000    
Cost of revenues [Member]
     
Share-based compensation expense      
Share-based compensation 1,178,000 1,009,000 798,000
Research and development [Member]
     
Share-based compensation expense      
Share-based compensation 3,132,000 2,401,000 1,808,000
Selling, general and administrative [Member]
     
Share-based compensation expense      
Share-based compensation $ 3,282,000 $ 2,444,000 $ 2,119,000
Restricted Stock Units (RSUs) [Member]
     
Share-based compensation expense      
Compensation cost not yet recognized, period for recognition 3 years 1 month 1 day    
Stock Option [Member]
     
Share-based compensation expense      
Compensation cost not yet recognized, period for recognition 3 years 1 month 1 day