<SEC-DOCUMENT>0001628280-16-014675-index.html : 20160422
<SEC-HEADER>0001628280-16-014675.hdr.sgml : 20160422
<ACCEPTANCE-DATETIME>20160422073657
ACCESSION NUMBER:		0001628280-16-014675
CONFORMED SUBMISSION TYPE:	10-K/A
PUBLIC DOCUMENT COUNT:		17
CONFORMED PERIOD OF REPORT:	20151231
FILED AS OF DATE:		20160422
DATE AS OF CHANGE:		20160422

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		161585262

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-K/A
<SEQUENCE>1
<FILENAME>mtsn201510ka.htm
<DESCRIPTION>10-K/A
<TEXT>
Document 1 - file: mtsn201510ka.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>2
<FILENAME>mtsn20151231-ex3111.htm
<DESCRIPTION>EXHIBIT 31.1
<TEXT>
Document 2 - file: mtsn20151231-ex3111.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>3
<FILENAME>mtsn20151231-ex3121.htm
<DESCRIPTION>EXHIBIT 31.2
<TEXT>
Document 3 - file: mtsn20151231-ex3121.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>4
<FILENAME>mtsn20151231-ex3211.htm
<DESCRIPTION>EXHIBIT 32.1
<TEXT>
Document 4 - file: mtsn20151231-ex3211.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.INS
<SEQUENCE>5
<FILENAME>mtsn-20151231.xml
<DESCRIPTION>XBRL INSTANCE DOCUMENT
<TEXT>
Document 5 - file: mtsn-20151231.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>6
<FILENAME>mtsn-20151231.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT
<TEXT>
Document 6 - file: mtsn-20151231.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>7
<FILENAME>mtsn-20151231_cal.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT
<TEXT>
Document 7 - file: mtsn-20151231_cal.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>8
<FILENAME>mtsn-20151231_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT
<TEXT>
Document 8 - file: mtsn-20151231_def.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>9
<FILENAME>mtsn-20151231_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT
<TEXT>
Document 9 - file: mtsn-20151231_lab.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>10
<FILENAME>mtsn-20151231_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT
<TEXT>
Document 10 - file: mtsn-20151231_pre.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>prlogoa01a01a01a03.jpg
<TEXT>
Document 11 - file: prlogoa01a01a01a03.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 12 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>13
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 13 - file: Financial_Report.xlsx

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 14 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 15 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 17 - file: FilingSummary.html

Document 17 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>19
<FILENAME>0001628280-16-014675-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 19 - file: 0001628280-16-014675-xbrl.zip

</DOCUMENT>
</SEC-DOCUMENT>