<SEC-DOCUMENT>0001628280-16-011483-index.html : 20160222
<SEC-HEADER>0001628280-16-011483.hdr.sgml : 20160222
<ACCEPTANCE-DATETIME>20160222163254
ACCESSION NUMBER:		0001628280-16-011483
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20160219
FILED AS OF DATE:		20160222
DATE AS OF CHANGE:		20160222

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			CHEN FUSEN ERNIE
		CENTRAL INDEX KEY:			0001316245

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		161445406

	MAIL ADDRESS:	
		STREET 1:		4000 NORTH FIRST STREET
		CITY:			SAN JOSE
		STATE:			CA
		ZIP:			95134
</SEC-HEADER>
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<TYPE>4
<SEQUENCE>1
<FILENAME>wf-form4_145617675106924.xml
<DESCRIPTION>FORM 4
<TEXT>
Document 1 - file: wf-form4_145617675106924.html

Document 1 - RAW XML: wf-form4_145617675106924.xml

</DOCUMENT>
</SEC-DOCUMENT>