<SEC-DOCUMENT>0001628280-15-004561-index.html : 20150529
<SEC-HEADER>0001628280-15-004561.hdr.sgml : 20150529
<ACCEPTANCE-DATETIME>20150529150830
ACCESSION NUMBER:		0001628280-15-004561
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20150528
ITEM INFORMATION:		Submission of Matters to a Vote of Security Holders
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20150529
DATE AS OF CHANGE:		20150529

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		15899032

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>form8k-may292015.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: form8k-may292015.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.1
<SEQUENCE>2
<FILENAME>a2012_equityxincentivexplan.htm
<DESCRIPTION>EXHIBIT 10.1
<TEXT>
Document 2 - file: a2012_equityxincentivexplan.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>coverlogoa01.jpg
<TEXT>
Document 3 - file: coverlogoa01.jpg

</DOCUMENT>
</SEC-DOCUMENT>