Document and Entity Information	3 Months Ended
	Mar. 29, 2015	May 04, 2015
Document and Entity Information
Entity Registrant Name	MATTSON TECHNOLOGY INC
Entity Central Index Key	0000928421
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Mar. 29, 2015
Document Fiscal Year Focus	2015
Document Fiscal Period Focus	Q1
Amendment Flag	false
Entity Common Stock, Shares Outstanding		74,868,670