<SEC-DOCUMENT>0001628280-15-002244-index.html : 20150413
<SEC-HEADER>0001628280-15-002244.hdr.sgml : 20150413
<ACCEPTANCE-DATETIME>20150413170711
ACCESSION NUMBER:		0001628280-15-002244
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20141231
FILED AS OF DATE:		20150413
DATE AS OF CHANGE:		20150413
EFFECTIVENESS DATE:		20150413

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		15767262

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>proxystatement2015.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: proxystatement2015.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>prlogoa01a04a01.jpg
<TEXT>
Document 2 - file: prlogoa01a04a01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>signaturea02a01.jpg
<TEXT>
Document 3 - file: signaturea02a01.jpg

</DOCUMENT>
</SEC-DOCUMENT>