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RESTRUCTURING AND OTHER CHARGES - Summary of Changes in Restructuring Accrual (Footnote) (Details) (USD $)
In Thousands, unless otherwise specified
12 Months Ended
Dec. 31, 2012
Restructuring Cost and Reserve [Line Items]  
Long-lived assets write-off $ (230)mtsn_RestructuringReserveLongLivedAssetWriteOff
Other costs  
Restructuring Cost and Reserve [Line Items]  
Long-lived assets write-off $ (230)mtsn_RestructuringReserveLongLivedAssetWriteOff
/ us-gaap_RestructuringCostAndReserveAxis
= us-gaap_OtherRestructuringMember
[1]
[1] $0.2 million charge related to impairment of property and equipment resulting from the transfer of our research, development and prototype production of the Millios system to our facility in Dornstadt, Germany and the consolidation of global manufacturing in our facility in Fremont, California.