<SEC-DOCUMENT>0001193125-16-503695-index.html : 20160314
<SEC-HEADER>0001193125-16-503695.hdr.sgml : 20160314
<ACCEPTANCE-DATETIME>20160314172336
ACCESSION NUMBER:		0001193125-16-503695
CONFORMED SUBMISSION TYPE:	DEFA14A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20160314
DATE AS OF CHANGE:		20160314
EFFECTIVENESS DATE:		20160314

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MATTSON TECHNOLOGY INC
		CENTRAL INDEX KEY:			0000928421
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				770208119
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEFA14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-24838
		FILM NUMBER:		161504834

	BUSINESS ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
		BUSINESS PHONE:		510 657 5900

	MAIL ADDRESS:	
		STREET 1:		47131 BAYSIDE PARKWAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94538
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEFA14A
<SEQUENCE>1
<FILENAME>d162670ddefa14a.htm
<DESCRIPTION>DEFA14A
<TEXT>
Document 1 - file: d162670ddefa14a.htm

</DOCUMENT>
</SEC-DOCUMENT>