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Intangible Assets - Note 5
12 Months Ended
Dec. 31, 2011
Intangible Assets [Abstract]  
Intangible Assets Disclosure

 5. INTANGIBLE ASSETS

In December 2009, we acquired intellectual property assets related to our etch and strip plasma processes for $1.3 million, which are included in intangibles, net in the accompanying consolidated balance sheets. These assets are being amortized over a 5-year period in research, development and engineering in the accompanying consolidated statements of operations. We had amortization charges of $0.3 million and $0.3 million in 2011 and 2010, respectively.

The following table summarizes intangible asset activities for the years ended December 31, 2011, 2010 and 2009:

            Developed Technology
                Accumulated    
                 Cost        Amortization         Net      
          (thousands)
Balance at December 31, 2009           $ 1,250    $       -     $ 1,250 
     Amortization           -     (250)   (250)
Balance at December 31, 2010           1,250    (250)   1,000 
     Amortization           -     (250)   (250)
Balance at December 31, 2011           $ 1,250    $  (500)   $    750