Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001136261-11-000139
Filing Date
2011-03-11
Accepted
2011-03-11 14:14:24
Documents
18
Period of Report
2010-12-31

Document Format Files

Seq Description Document Type Size
1 10-K form10k.htm 10-K 1120311
3 AMENDED AND RESTATED 1994 EMPLOYEE STOCK PURCHASE PLAN exh10-5.htm EX-10.5 28813
4 SUBSIDIARIES exh21-1.htm EX-21.1 1754
5 CONSENT exh23-1.htm EX-23.1 1133
6 CEO 302 CERTIFICATE exh31-1.htm EX-31.1 4561
7 CFO 302 CERTIFICATE exh31-2.htm EX-31.2 4578
8 CEO 906 CERTIFICATE exh32-1.htm EX-32.1 2186
9 CFO 906 CERTIFICATE exh32-2.htm EX-32.2 2233
10 10-K form10-k.pdf 10-K 501073
11 AMENDED AND RESTATED 1994 EMPLOYEE STOCK PURCHASE PLAN exhibit10-5.pdf EX-10.5 75601
12 SUBSIDIARIES exhibit21-1.pdf EX-21.1 7808
13 CONSENT exhibit23-1.pdf EX-23.2 10253
14 CEO 302 CERTIFICATE exhibit31-1.pdf EX-31.1 67349
15 CFO 302 CERTIFICATE exhibit31-2.pdf EX-31.2 117842
16 CEO 906 CERTIFICATE exhibit32-1.pdf EX-32.1 79785
17 CFO 906 CERTIFICATE exhibit32-2.pdf EX-32.2 83930
18 LOGO prlogo.jpg GRAPHIC 2945
19 PERFORMANCE CHART graph.gif GRAPHIC 5126
  Complete submission text file 0001136261-11-000139.txt   2479434
Mailing Address 47131 BAYSIDE PARKWAY FREMONT CA 94538
Business Address 47131 BAYSIDE PARKWAY FREMONT CA 94538 510 657 5900
MATTSON TECHNOLOGY INC (Filer) CIK: 0000928421 (see all company filings)

EIN.: 770208119 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-24838 | Film No.: 11681431
SIC: 3559 Special Industry Machinery, NEC