Document and Entity Information (USD $) In Millions, except Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2013	Mar. 13, 2014	Jun. 28, 2013
Entity Information [Line Items]
Entity Registrant Name	MATTSON TECHNOLOGY INC
Entity Central Index Key	0000928421
Document Type	10-K
Document Period End Date	Dec. 31, 2013
Amendment Flag	false
Current Fiscal Year End Date	--12-31
Is Entity a Well-known Seasoned Issuer?	No
Is Entity a Voluntary Filer?	No
Is Entity's Reporting Status Current?	Yes
Entity Filer Category	Accelerated Filer
Entity Common Stock, Shares Outstanding		73,423,642
Document Fiscal Period Focus	FY
Document Fiscal Year Focus	2013
Entity Public Float			$ 119.1