X0202 4 2004-05-05 0000927003 ADVANCED ENERGY INDUSTRIES INC AEIS 0001228897 STAREK GERALD M 1625 SHARP POINT DRIVE FORT COLLINS CO US 1 0 0 0 Common Stock 26456 D Director Stock Option (right to buy) 8.76 1994-11-30 2004-11-30 Common Stock 4929 4929 D Director Stock Option (right to buy) 8.76 1995-11-30 2005-11-30 Common Stock 4929 9858 D Director Stock Option (right to buy) 11.05 1996-11-30 2006-11-30 Common Stock 1643 11501 D Director Stock Option (right to buy) 15.03 1997-11-30 2007-11-30 Common Stock 1643 13144 D Director Stock Option (right to buy) 6.75 1998-10-08 2008-10-08 Common Stock 7500 20644 D Director Stock Option (right to buy) 34.50 1999-10-08 2009-10-08 Common Stock 2500 23144 D Director Stock Option (right to buy) 30.625 2000-10-08 2010-10-08 Common Stock 2500 25644 D Director Stock Option (right to buy) 17.57 2001-10-08 2011-10-08 Common Stock 2500 28144 D Director Stock Option (right to buy) 6.15 2002-10-08 2012-10-08 Common Stock 2500 30644 D Director Stock Option (right to buy) 10.67 2003-05-07 2013-05-07 Common Stock 5000 35644 D Director Stock Option (right to buy) 14.40 2004-05-05 4 A 0 5000 14.40 A 2004-05-05 2014-05-05 Common Stock 5000 40644 D Options had been granted as options to purchase common stock of RF Power Products, Inc. Options were assumed by the Issuer and converted into options to purchase Common Stock of the Issuer pursuant to the Issuer's acquisition of RF Power Products as of October 8, 1998. Options are exercisable immediately. The director stock option granted on October 8, 1998 is immediately exercisable as to 2,500 shares of Common Stock and will vest as to 2,500 shares on each of October 8, 2000 and October 8, 2001. The director stock options granted on October 8, 1999, October 8, 2000, October 8, 2001 and October 8, 2002 will vest as to 2,500 shares of Common Stock on the third anniversary of the grant date. The director stock options granted on May 7, 2003 and May 5, 2004 are immediately fully exercisable. Mr. Starek has Director Stock Options (right to buy) for a total of 40,644 shares of Common Stock with the above exercise prices and expiration dates. Michael El-Hillow - Attorney-in-Fact 2004-05-06