XML 84 R73.htm IDEA: XBRL DOCUMENT v3.24.1.u1
Employee Benefits and Share-Based Compensation - Shared-based Compensation Expense (Details) - USD ($)
$ in Thousands
3 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Share-based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]    
Share-based compensation expense $ 8,641 $ 14,042
Cost of product and service revenues    
Share-based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]    
Share-based compensation expense 1,555 2,008
Research and development    
Share-based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]    
Share-based compensation expense 1,075 1,606
Selling, general, and administrative    
Share-based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]    
Share-based compensation expense $ 6,011 $ 10,428