X0201 5 2003-06-30 0 0 0 0000319201 KLA TENCOR CORP klac 0000923960 ELKUS RICHARD J JR C/O KLA-TENCOR CORP. 160 RIO ROBLES SAN JOSE CA 95134 1 0 0 0 Common Stock 100000 D Non-Qualified Stock Option 37.05 2002-11-08 2012-11-08 Common Stock 10000 10000 D Non-Qualified Stock Option 46.28 1999-11-16 2009-11-16 Common Stock 10000 10000 D Non-Qualified Stock Option 47.23 2001-11-09 2011-11-09 Common Stock 10000 10000 D Form 5 filed to voluntarily report all holdings Richard J. Elkus, Jr. 2003-08-08