Related-Party Activity (Tables)

12 Months Ended

Dec. 31, 2015

Related Party Transactions [Abstract]

Schedule of Transactions with Related Parties

Transactions with these related parties were as follows (in thousands):

	Year Ended December 31,
Sales to Related Parties	2015		2014		2013
Product sales:
Applied Materials, Inc.	$	161	$	2,706	$	4,656
Electro Scientific Industries, Inc.	23		390		—
Oregon Health and Science University	724		364		555
Total product sales to related parties	908		3,460		5,211
Service sales:
Applied Materials, Inc.	526		829		719
Oregon Health and Science University	332		347		85
Total service sales to related parties	858		1,176		804
Total sales to related parties	$	1,766	$	4,636	$	6,015
Purchases from Related Parties
Electro Scientific Industries, Inc.	$	19	$	—	$	—
Oregon Health and Science University	13		119		353
TMC BV	1,534		2,348		580
Total purchases from related parties	$	1,566	$	2,467	$	933

Schedule of Amounts Due From (To) Related Parties

Amounts due from (to) related parties were as follows (in thousands):

	December 31, 2015
Oregon Health and Science University	$	931
TMC BV	(129		)
Due from related parties, net	$	802