Related-Party Activity

12 Months Ended

Dec. 31, 2015

Related Party Transactions [Abstract]

Related-Party Activity

RELATED-PARTY ACTIVITY

Related parties with which we had transactions during 2015 were as follows:

• one of the members of our Board of Directors served on the Board of Directors of Applied Materials, Inc.;

• one of the members of our Board of Directors serves on the Board of Directors of Electro Scientific Industries, Inc.;

• one of the members of our Board of Directors serves on the Supervisory Board of TMC BV; and

• our Chief Executive Officer is on the Board of Trustees for the Oregon Health and Science University Foundation.

Transactions with these related parties were as follows (in thousands):

	Year Ended December 31,
Sales to Related Parties	2015		2014		2013
Product sales:
Applied Materials, Inc.	$	161	$	2,706	$	4,656
Electro Scientific Industries, Inc.	23		390		—
Oregon Health and Science University	724		364		555
Total product sales to related parties	908		3,460		5,211
Service sales:
Applied Materials, Inc.	526		829		719
Oregon Health and Science University	332		347		85
Total service sales to related parties	858		1,176		804
Total sales to related parties	$	1,766	$	4,636	$	6,015
Purchases from Related Parties
Electro Scientific Industries, Inc.	$	19	$	—	$	—
Oregon Health and Science University	13		119		353
TMC BV	1,534		2,348		580
Total purchases from related parties	$	1,566	$	2,467	$	933

Amounts due from (to) related parties were as follows (in thousands):

	December 31, 2015
Oregon Health and Science University	$	931
TMC BV	(129		)
Due from related parties, net	$	802