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Related-Party Activity (Details) - USD ($)
$ in Thousands
3 Months Ended 6 Months Ended
Jun. 28, 2015
Jun. 29, 2014
Jun. 28, 2015
Jun. 29, 2014
Related Party Transaction [Line Items]        
Product sales to related parties $ 85 $ 1,502 $ 199 $ 2,591
Service sales to related parties 336 280 685 530
Total sales to related parties 421 1,782 884 3,121
Purchases from related parties 658 921 1,358 1,368
Applied Materials [Member]        
Related Party Transaction [Line Items]        
Product sales to related parties 74 1,383 161 2,342
Service sales to related parties 262 187 526 355
Oregon Health and Science University [Member]        
Related Party Transaction [Line Items]        
Product sales to related parties 7 119 19 249
Service sales to related parties 74 93 159 175
Purchases from related parties 11 39 11 78
Electro Scientific Industries [Member]        
Related Party Transaction [Line Items]        
Product sales to related parties 4 0 19 0
TMC BV [Member]        
Related Party Transaction [Line Items]        
Purchases from related parties $ 647 $ 882 $ 1,347 $ 1,290