Related-Party Activity (Tables)

6 Months Ended

Jun. 28, 2015

Related Party Transactions [Abstract]

Schedule of Transactions with Related Parties

Transactions with these related parties were as follows (in thousands):

	Thirteen Weeks Ended				Twenty-Six Weeks Ended
Sales to Related Parties	June 28, 2015		June 29, 2014		June 28, 2015		June 29, 2014
Product sales:
Applied Materials, Inc.	$	74	$	1,383	$	161	$	2,342
Oregon Health and Science University	7		119		19		249
Electro Scientific Industries, Inc.	4		—		19		—
Total product sales to related parties	85		1,502		199		2,591
Service sales:
Applied Materials, Inc.	262		187		526		355
Oregon Health and Science University	74		93		159		175
Total service sales to related parties	336		280		685		530
Total sales to related parties	$	421	$	1,782	$	884	$	3,121
Purchases from Related Parties
TMC BV	$	647	$	882	$	1,347	$	1,290
Oregon Health and Science University	11		39		11		78
Total purchases from related parties	$	658	$	921	$	1,358	$	1,368

Schedule of Amounts Due From (To) Related Parties

Amounts due from (to) related parties were as follows (in thousands):

	June 28, 2015
Applied Materials, Inc.	$	161
TMC BV	(605		)
Oregon Health and Science University	5
Due to related parties, net	$	(439	)