Related-Party Activity (Tables)

3 Months Ended

Mar. 29, 2015

Related Party Transactions [Abstract]

Schedule of Transactions with Related Parties

Transactions with these related parties were as follows (in thousands):

	Thirteen Weeks Ended
Sales to Related Parties	March 29, 2015		March 30, 2014
Product sales:
Applied Materials, Inc.	$	87	$	959
Oregon Health and Science University	12		130
Electro Scientific Industries, Inc.	15		—
Total product sales to related parties	114		1,089
Service sales:
Applied Materials, Inc.	264		168
Lattice Semiconductor Corporation	3		3
Cascade Microtech, Inc.	8		8
Oregon Health and Science University	85		82
Total service sales to related parties	360		261
Total sales to related parties	$	474	$	1,350
Purchases from Related Parties
TMC BV	$	700	$	408
Oregon Health and Science University	—		39
Total purchases from related parties	$	700	$	447

Schedule of Amounts Due From (To) Related Parties

Amounts due from (to) related parties were as follows (in thousands):

	March 29, 2015
Applied Materials, Inc.	$	146
Cascade Microtech, Inc.	8
TMC BV	(311		)
Oregon Health and Science University	3
Electro Scientific Industries, Inc.	$	39
Due to related parties, net	$	(115	)