Exhibit 23.1

[Letterhead of KPMG LLP]

Consent of Independent Registered Public Accounting Firm

The Board of Directors

FEI Company:

We consent to the use of our reports dated February 21, 2014, with respect to the consolidated balance sheets of FEI Company as of December 31, 2013 and 2012, and the related consolidated statements of operations, comprehensive income, shareholders' equity, and cash flows, for each of the three years in the three-year period ended December 31, 2013, and the effectiveness of internal control over financial reporting as of December 31, 2013, incorporated by reference herein.

/s/KPMG LLP

Portland, Oregon

December 17, 2014